Stage device and pattern transfer system using the same

Details Stage device and pattern transfer system using the same Stage device and pattern transfer system using the same

1994-07-15

1997-11-04

Wong, Don

X-ray or gamma ray systems or devices

Specific application

Lithography

378208, 25045311, H05G 100

Patent

active

056848560

ABSTRACT:
A stage device includes a first, fine-motion driving system for moving a movable stage through a first range; and a second, relatively rough-motion driving system for moving the movable stage through a second range which is substantially of the same extent as the first range.

REFERENCES:
patent: 5073912 (1991-12-01), Kobayashi et al.
patent: 5260580 (1993-11-01), Itoh et al.

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