Stage base, substrate processing apparatus, and maintenance...

Details Stage base, substrate processing apparatus, and maintenance... Stage base, substrate processing apparatus, and maintenance...

2006-06-13

2006-06-13

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C438S690000, C355S051000, C108S020000

Reexamination Certificate

active

07060990

ABSTRACT:
A stage base comprises a base body, an elevator, and a shifter. The base body has a bottom face facing a reference surface. The elevator is attached to the base body and operative to move the base body in a vertical direction with respect to the reference surface. The shifter is attached to the elevator. The shifter enables the base body to move along the reference surface.

REFERENCES:
patent: 6529260 (2003-03-01), Sogard
patent: 2002/0015140 (2002-02-01), Yoda
patent: 2002/0018192 (2002-02-01), Nishi
patent: 4-171715 (1992-06-01), None
patent: 2000-58629 (2000-02-01), None
patent: 2002-252275 (2002-09-01), None

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