Stage assembly of microscope which prevents its particles of wea

Details Stage assembly of microscope which prevents its particles of wea Stage assembly of microscope which prevents its particles of wea

1998-09-04

1999-10-19

Henry, Jon

Optical: systems and elements

Compound lens system

Microscope

359507, G02B 2126

Patent

active

059698578

ABSTRACT:
A microscope stage assembly prevents particles generated by the meshing of gears of the assembly from dispersing onto the hands of an operator. The assembly includes a stage, a drive system for the stage which is made up of X- and Y-axis drive pinions meshing with X- and Y-axis racks, respectively, and control knobs which are manipulated by an operator to rotate the drive pinions. In one embodiment, a particle collection tray is positioned between the gears and the control knobs to catch any particles falling from the gears before the particles reach the hands of the operator. In another embodiment, a vacuum system includes vacuum lines which open to the sides of the racks meshing with the drive pinions. Any particles produced by the meshing of the gears are removed from the area of the microscope via the vacuum lines. Thus, if the operator is taking part in a process that is sensitive to particle contamination, such as a semiconductor manufacturing process, the operator will not bring particles from the microscope with him when entering the clean room after having used the microscope to examine products being made in the clean room.

REFERENCES:
patent: 4827725 (1989-05-01), Morse
patent: 4893914 (1990-01-01), Hancock et al.
patent: 5466979 (1995-11-01), Bryant et al.
patent: 5802925 (1998-09-01), Kanao

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