Stage assembly having a follower assembly

Details Stage assembly having a follower assembly Stage assembly having a follower assembly

2005-06-07

2005-06-07

Pham, Hai (Department: 2853)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S548000, C250S492210

Reexamination Certificate

active

06903346

ABSTRACT:
A stage assembly (10) for moving and positioning a device (26) includes a device stage (14), a stage mover assembly (16), and a follower assembly (18). The stage mover assembly (16) moves the device stage (14) along an X axis, along a Y axis and about a Z axis. The follower assembly (18) includes a first follower guide (76) and a first follower frame (80). The first follower guide (76) supports the first follower frame (80) and allows the first follower frame (80) to move along the Y axis. Further, the first follower frame (80) supports the device stage (14) and allows the device stage (14) to move along the Y axis, along the X axis, and about the Z axis. Importantly, the first follower frame (80) is moved along the Y axis with a first follower mover (84). With this design, the device stage (14) can be made relatively thin vertically and the control lines (20) to the device stage (14) can be relatively short.

REFERENCES:
patent: 3652148 (1972-03-01), George
patent: 4120210 (1978-10-01), Sloyan
patent: 4538885 (1985-09-01), Graham et al.
patent: 4684315 (1987-08-01), Sughishima et al.
patent: 4979195 (1990-12-01), Tabata et al.
patent: 5073912 (1991-12-01), Kobayashi et al.
patent: 5120034 (1992-06-01), Van Engelen et al.
patent: 5214290 (1993-05-01), Sakai
patent: 5552888 (1996-09-01), Sogard et al.
patent: 5623853 (1997-04-01), Novak et al.
patent: 5877845 (1999-03-01), Makinouchi
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 6008500 (1999-12-01), Lee
patent: 6130517 (2000-10-01), Yuan et al.
patent: 6281655 (2001-08-01), Poon et al.

Affiliated with

Also associated with

Rating

Stage assembly having a follower assembly does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Stage assembly having a follower assembly, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stage assembly having a follower assembly will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3466665