Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-06-14
2005-06-14
Fuller, Rodney (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S076000
Reexamination Certificate
active
06906782
ABSTRACT:
An exposure apparatus has a triangular shaped stage which is movable in a two-dimensional plane while holding a substrate. The stage has a reflecting surface provided on a side face of the stage so that the surface extends in a specific direction intersecting Y axis and X axis. An interferometer radiates a beam onto the reflecting surface to measure a position of the stage in a direction perpendicular to the specific direction. Using the measured position and an angle of the specific direction, a calculator can calculate the position of the stage on rectangular coordinate system defined by X and Y axes. The size and weight of the stage can be reduced, and the throughput of the exposure apparatus is improved.
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Fuller Rodney
Nikon Corporation
Oliff & Berridg,e PLC
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