Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate
1999-08-30
2002-02-12
Andrson, Bruce (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
C250S440110, C250S306000, C250S311000, C074S479010, C074S4710XY
Reexamination Certificate
active
06346710
ABSTRACT:
BACKGROUND OF THE INVENTION
The present invention relates to a moving apparatus or a stage apparatus used in a scanning mechanism for, for example, a scanning probe microscope, a scanning laser microscope or the like and moving an object to be moved or a movable table at a high positional accuracy.
In an electron microscope, a super precision working machine or the like, in order to move an object to be measured or an object to be worked at a high positional accuracy, a stage apparatus employing an elastic spring guide is usually utilized. Since the elastic spring guide does not have a sliding portion, it is not affected by a play, a friction and an abrasion, so that it is possible to perform a position control at a high accuracy.
Most of the stage apparatus applying the spring guide generally includes a plurality of single-axis drive stages layered each other. However, this structure involves an enlarged size of the stage apparatus.
BRIEF SUMMARY OF THE INVENTION
An object of the present invention is to provide a compact stage apparatus which employs a spring guide excellent in a positioning performance and is suitable for being used under a microscope.
Additional objects and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objects and advantages of the invention may be realized and obtained by means of the instrumentalities and combinations particularly pointed out hereinafter.
REFERENCES:
patent: 4409860 (1983-10-01), Moriyama et al.
patent: 4805543 (1989-02-01), Schwab et al.
patent: 5051594 (1991-09-01), Tsuda et al.
patent: 5092193 (1992-03-01), Yanagisawa
patent: 5140242 (1992-08-01), Doran et al.
patent: 41 00 686 (1991-07-01), None
patent: 43 25 450 (1995-01-01), None
Y. Ue, N. Sakai, H. Takahashi, Y. Yoshimura, “Spring Stage for 3-dimensional Positioning” taken from Papers of Academic Lectures in Spring 1998 Convention of Japan Society for Precision Engineering.
Y. Yoshimura, “Analysis of Stiffness of Elastic Hinges” taken from Journal of Japan Society for Precision Engineering, vol. 64, No. 11, 1998.
Andrson Bruce
Frishauf, Holtz Goodman, Langer & Chick, P.C.
Olympus Optical Co,. Ltd.
Wells Nikita
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