Stage apparatus

Details Stage apparatus Stage apparatus

2007-07-10

2007-07-10

Smith, R. Alexander (Department: 2859)

Geometrical instruments

Miscellaneous

Light direction

C033S568000, C269S903000

Reexamination Certificate

active

11050761

ABSTRACT:
A stage apparatus may include a first stage, a second stage movable with respect to the first stage, at least one flexure hinge to connect the first stage with the second stage, a plurality of actuators provided between the first stage and the second stage to push the first stage and the second stage and to be symmetric with respect to a center of the first stage and the second stage, and a controller to control the plurality of actuators to move one of the first stage and the second stage with respect to the other one of the first stage and the second stage. Thus, a position error of the stage can be reduced, which enables an ultra precision position control. Further, a piezoelectric driver using piezoelectric elements may be used as the actuator to decrease the position error more than a conventional driver such as a motor. The position error may be decreased to ±10 nm.

REFERENCES:
patent: 4559717 (1985-12-01), Scire et al.
patent: 4575942 (1986-03-01), Moriyama
patent: 4667415 (1987-05-01), Barsky
patent: 4887804 (1989-12-01), Ohtsuka
patent: 5005298 (1991-04-01), Nagasawa et al.
patent: 5281884 (1994-01-01), Basavanhally et al.
patent: 5352249 (1994-10-01), Vollaro
patent: 6252705 (2001-06-01), Lo et al.
patent: 6346710 (2002-02-01), Ue
patent: 6467761 (2002-10-01), Amatucci et al.
patent: 6688183 (2004-02-01), Awtar et al.
patent: 6806991 (2004-10-01), Sarkar et al.
patent: 6836033 (2004-12-01), Gweon et al.
patent: 6920696 (2005-07-01), Sawada et al.
patent: 6935042 (2005-08-01), Bonham et al.
patent: 7015066 (2006-03-01), Tsao et al.
patent: 2002/0194926 (2002-12-01), Awtar et al.
patent: 2004/0163450 (2004-08-01), Gweon et al.
patent: 2006/0064884 (2006-03-01), Seo
patent: 8-94780 (1996-04-01), None
patent: 1-236036 (1998-10-01), None
patent: 2003-98059 (2003-04-01), None
patent: 10-280870 (2000-11-01), None
patent: 10-302179 (2001-07-01), None
patent: 10-381974 (2003-04-01), None
patent: 10-381975 (2003-04-01), None
patent: 2003-39169 (2003-05-01), None
Korean Office Action issued Nov. 17, 2005 in corresponding Korean application.

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