Stacked delta cell capacitor

Details Stacked delta cell capacitor Stacked delta cell capacitor

1994-04-05

1994-12-06

LaRoche, Eugene R.

Static information storage and retrieval

Systems using particular element

Capacitors

257306, 257309, H01L 2968

Patent

active

053717015

ABSTRACT:
A stacked delta cell (SDC) capacitor using a modified stacked capacitor storage cell fabrication process. The SDC is made up of polysilicon structure, having an inverted deltoid cross section, located at a buried contact and extending to an adjacent storage node overlaid by polysilicon with a dielectric sandwiched in between. The addition of the polysilicon structure increases storage capability 120% without enlarging the surface area defined for a normal stacked capacitor cell.

REFERENCES:
patent: 5130885 (1992-07-01), Fazan et al.
patent: 5285092 (1994-02-01), Yoneda

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