Stacked coplanar waveguide having signal and ground lines...

Details Stacked coplanar waveguide having signal and ground lines... Stacked coplanar waveguide having signal and ground lines...

2008-12-29

2011-11-15

Lee, Benny (Department: 2817)

Wave transmission lines and networks

Long lines

Strip type

C333S246000, C257S664000

Reexamination Certificate

active

08058953

ABSTRACT:
An integrated circuit structure includes a semiconductor substrate; an interconnect structure over the semiconductor substrate; a first dielectric layer over the semiconductor substrate and in the interconnect structure; a second dielectric layer in the interconnect structure and over the first dielectric layer; and a wave-guide. The wave-guide includes a first portion in the first dielectric layer and a second portion in the second dielectric layer. The first portion adjoins the second portion.

REFERENCES:
patent: 4626889 (1986-12-01), Yamamoto et al.
patent: 6490379 (2002-12-01), Boudreau et al.
patent: 7081648 (2006-07-01), Tsai
patent: 2001/0033209 (2001-10-01), Ogawa
patent: 2005/0248421 (2005-11-01), Joodaki
patent: 2007/0241844 (2007-10-01), Kim et al.

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