Stable N-channel MOS structure

Metal working – Method of mechanical manufacture – Assembling or joining

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Details

29578, 357 23, 357 59, B01J 1700

Patent

active

042121000

ABSTRACT:
An N-channel MOS integrated circuit device having a composite metal gate structure which has improved temperature stability. The gate structure uses a polysilicon layer to separate the conventional metal gate from the conventional underlying gate oxide. The metal gate and the polysilicon layer extend laterally at least to the lateral extent of the gate region. This composite metal gate structure improves the temperature stability of the IC, and may be used, for example, in read-only memory (ROM) applications. The polysilicon layer is formed without additional photolithographic steps.

REFERENCES:
patent: 3958323 (1976-05-01), De La Moneda
patent: 4074300 (1978-02-01), Sakai
patent: 4114256 (1978-09-01), Thibault
patent: 4115914 (1978-09-01), Harari

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