Stabilizing and supporting apparatus for float zone refined semi

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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422250, 156DIG98, C30B 1300

Patent

active

042578418

ABSTRACT:
Apparatus and method for stabilizing and supporting a crystal semiconductor rod during fabrication refining from the action of a seed rod on a float zone melt of a crystalline rod source is provided wherein engageable fingers mounted in a vertically movable tube in axial register with the shaft holding the crystal seed rod are pivotally mounted in a non-horizontal upward position, the finger tips being force loaded for inward movement upon removal of a sleeve carrier so that the fingers engage, support, and stabilize the irregular cylindrical surface of the refined semiconductor rod. The tube and fingers are engageable through sleeve and tube piston means resulting in uniform stabilization and support of the crystal refined rod. The apparatus and method prevent the refined rod from vibrating and oscillating about its axis; thus allowing enlarged dislocation free crystal rod growth from a crystalline rod source, said refined crystal rod being grown on a slender seed rod.

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patent: 3233984 (1966-02-01), Erdman
patent: 3901499 (1975-08-01), Sporrer
patent: 3961966 (1976-06-01), Keller
patent: 3988197 (1976-10-01), Keller
patent: 3994690 (1976-11-01), Defosse
patent: 3996011 (1976-12-01), Keller
patent: 4078897 (1978-03-01), Jericho
patent: 4140571 (1979-02-01), Herzer et al.

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