Work holders – With fluid means – Vacuum-type holding means
Reexamination Certificate
2007-03-20
2009-10-27
Rogers, David A. (Department: 2856)
Work holders
With fluid means
Vacuum-type holding means
C269S020000, C269S056000, C269S057000
Reexamination Certificate
active
07607647
ABSTRACT:
Substrate processing method and apparatus are disclosed. The substrate processing apparatus includes a non-contact air bearing chuck with a vacuum preload.
REFERENCES:
patent: 5160883 (1992-11-01), Blanz
patent: 5191218 (1993-03-01), Mori et al.
patent: 5374829 (1994-12-01), Sakamoto et al.
patent: 5511005 (1996-04-01), Abbe et al.
patent: 5564682 (1996-10-01), Tsuji
patent: 5857667 (1999-01-01), Lee
patent: 6257564 (2001-07-01), Avneri et al.
patent: 6623329 (2003-09-01), Moore
patent: 6695687 (2004-02-01), Hollatz et al.
patent: 6746022 (2004-06-01), Cheung et al.
patent: 6822407 (2004-11-01), Hunter
patent: 7028595 (2006-04-01), Ben-Menachem et al.
patent: 7282930 (2007-10-01), Beier et al.
patent: 7301606 (2007-11-01), Arai
patent: 2002/0117792 (2002-08-01), Leidy et al.
patent: 2003/0001103 (2003-01-01), Kobayashi et al.
patent: 2003/0075849 (2003-04-01), Choi
patent: 2004/0012775 (2004-01-01), Kinney et al.
patent: 2004/0211285 (2004-10-01), Hunter
patent: 2005/0012920 (2005-01-01), Jeanne et al.
patent: 2005/0102108 (2005-05-01), Ramachandran et al.
patent: 2005/0162178 (2005-07-01), Steele et al.
patent: 2006/0121832 (2006-06-01), Allaire et al.
patent: 2007/0252970 (2007-11-01), Shibazaki
patent: 2008/0013060 (2008-01-01), Ichinose et al.
patent: 2008/0047577 (2008-02-01), Goto et al.
patent: 2008/0142733 (2008-06-01), Zywno et al.
patent: 2008/0151213 (2008-06-01), Arai
patent: 2008/0192226 (2008-08-01), Shibazaki
patent: 2008/0198485 (2008-08-01), Kosmowski
patent: WO 2006/023595 (2006-03-01), None
New Way® Air Bearings—Vaccuum Preloaded Air Bearings, © 2005, New Way Air Bearings, Aston, PA, downloaded from the internet, downloaded from <http://www.newwayairbearings.com/Family.asp?FamilyID=796&Cat1ID=1156&Cat2ID=280&FamilyName=Vacuum%20Preloaded%20Air%20BearingsCatIName=Products&Cat2Name=Vacuum%20Preloaded%20Air%20Bearings> on Aug. 8, 2007.
Belyaev Alexander
Dando Howard W.
Doyle Paul Andrew
Vaez-Iravani Mehdi
Wolters Christian H.
Isenberg Joshua D.
JDI Patent
KLA-Tencor Technologies Corporation
Rogers David A.
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