Stabilization process for aluminum microcircuits which have been

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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Details

156646, 156656, 204192E, 427 88, 427383A, C23F 102

Patent

active

041837819

ABSTRACT:
Aluminum microcircuits which have been prepared by reactive-ion etching are stabilized against open circuits and short circuits by treating the microcircuits in an oxygen-containing atmosphere at a temperature of from about 200.degree. C. to about 450.degree. C.

REFERENCES:
patent: 3753768 (1973-08-01), Ichiki et al.
patent: 4026742 (1977-05-01), Fujino
patent: 4057460 (1977-11-01), Saxena

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