Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1978-09-25
1980-01-15
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156646, 156656, 204192E, 427 88, 427383A, C23F 102
Patent
active
041837819
ABSTRACT:
Aluminum microcircuits which have been prepared by reactive-ion etching are stabilized against open circuits and short circuits by treating the microcircuits in an oxygen-containing atmosphere at a temperature of from about 200.degree. C. to about 450.degree. C.
REFERENCES:
patent: 3753768 (1973-08-01), Ichiki et al.
patent: 4026742 (1977-05-01), Fujino
patent: 4057460 (1977-11-01), Saxena
Eldridge Jerome M.
Lee Wen-yaung
Schwartz Geraldine C.
International Business Machines - Corporation
Powell William A.
Walsh Joseph G.
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