Organic compounds -- part of the class 532-570 series – Organic compounds – Silicon containing
Reexamination Certificate
2006-09-01
2008-10-28
Barts, Samuel A (Department: 1621)
Organic compounds -- part of the class 532-570 series
Organic compounds
Silicon containing
Reexamination Certificate
active
07442822
ABSTRACT:
A process to stabilize nitrogen-containing or oxygen-containing organosilane from acid catalyzed attack and retard the resulting decomposition is disclosed. Such organosilanes, and the nitrogen-containing organosilane in particular, with a least one Si—H or N—H group are susceptible to this type of product decomposition. Treatment with a weakly basic ion exchange media retards this decomposition by scavenging the anions or acids that are attacking the Si—H group. Dilute exposures to these anions can initiate significant decomposition and effect product stability and long-term shelf-life for semiconductor processing for the use of silicon oxide, silicon oxynitride and silicon nitride films.
REFERENCES:
patent: 2834648 (1958-05-01), Bailey et al.
patent: 3928542 (1975-12-01), Bakey
patent: 4228092 (1980-10-01), Kotzsch et al.
patent: 4368313 (1983-01-01), Hayes
patent: 4709067 (1987-11-01), Chu et al.
patent: 4798889 (1989-01-01), Plueddemann et al.
patent: 6963006 (2005-11-01), Tsui et al.
patent: 0 028 524 (1984-08-01), None
patent: 0 206 621 (1989-11-01), None
patent: 0 367 492 (1990-05-01), None
B.J. Aylett, et al, “The Preparation and Properties of Dimethylamino- and Diethylamino-silane,” J. Chem. Soc. (A), 1967, pp. 652-655.
David G. Anderson, et al, “Isopropyldisilylamine and Disilyl-t-butylamine: Preparation, Spectroscopic Properties . . . , ” J. Chem. Soc. Dalton Trans., 1989, pp. 779-783.
Radhamani, K.N., et al; “A Convenient High Yield Room Temperature Synthesis of Mixed Tri(amino)silanes by Transamination of Tris(dicyclohexlyamino)silane and their Characteriisation”; Phosphorus, Sulfur and Silicon and the Related Elements; Gordon and Breach Science Publishers; Amsterdam, GB; 1993; vol. 79; pp. 65-68; XP009031036.
Bowen Heather Regina
Lei Xinjian
Senecal Lee Arthur
Air Products and Chemicals Inc.
Barts Samuel A
Chase Geoffrey L.
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