SRAM cell having stepped boundary regions and methods of...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means

Reexamination Certificate

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C257S511000, C257S514000, C257S515000

Reexamination Certificate

active

07105908

ABSTRACT:
A semiconductor device comprises a substrate. In addition, the semiconductor device comprises an active region and an isolation region. The active region is in the substrate and comprises a semiconductor material. The isolation region is also in the substrate, adjacent the active region and comprises an insulating material. The active region and isolation region form a surface having a step therein. The semiconductor further comprises a dielectric material formed over the step. The dielectric material has a dielectric constant greater than about 8.

REFERENCES:
patent: 6461887 (2002-10-01), Pradeep et al.
patent: 6670279 (2003-12-01), Pai et al.
patent: 2004/0217448 (2004-11-01), Kumagai et al.
patent: 2005/0156158 (2005-07-01), King
Conley, J.F., et al., “Preliminary Investigation of Hafnium Oxide Deposited via Atomic Layer Chemical Vapor Deposition (ALCVD),” 2001 IRW Final Report (2001), pp. 11-15.
Oh, C.B., et al., “Manufacturable Embedded CMOS 6T-SRAM Technology with High-k Gate Dielectric Device for System-on-Chip Applications,” International Electron Devices Meeting (2002) pp. 423-426.
Samavedam, S.B., et al., “Dual-Metal Gate CMOS with HfO2Gate Dielectric,” International Electron Device Meeting (2002) pp. 433-436.

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