Powder metallurgy processes – Forming articles by uniting randomly associated metal particles – Consolidation of powders
Patent
1994-12-23
1996-12-31
Jordan, Charles T.
Powder metallurgy processes
Forming articles by uniting randomly associated metal particles
Consolidation of powders
419 66, B22F 320
Patent
active
055903894
ABSTRACT:
A sputtering target comprising a body of metal such as aluminum and its alloy with an ultrafine grain size and small second phase. Also described is a method for making an ultra-fine grain sputtering target comprising melting, atomizing, and depositing atomized metal to form a workpiece, and fabricating the workpiece to form a sputtering target. A method is also disclosed that includes the steps of extruding a workpiece through a die having contiguous, transverse inlet and outlet channels of substantially identical cross section, and fabricating the extruded article into a sputtering target. The extrusion may be performed several times, producing grain size of still smaller size and controlled grain texture.
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Dunlop John A.
Emigh Roger A.
Kardokus Janine K.
Yuan Jun
Greaves John N.
Johnson Matthey Electronics Inc.
Jordan Charles T.
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