Sputtering target material

Details Sputtering target material Sputtering target material

2002-03-15

2008-12-16

King, Roy (Department: 1793)

Alloys or metallic compositions

Silver base

Other noble metal containing

C420S503000, C148S430000, C428S064100, C428S064400

Reexamination Certificate

active

07465424

ABSTRACT:
Provided is a sputtering target material which has a high reflectance and which is excellent in a sulfurization resistance, comprising an Ag alloy prepared by alloying Ag with a specific small amount of the metal component (A) selected from In, Sn and Zn, a specific small amount of the metal component (B) selected from Au, Pd and Pt and, if necessary, a small amount of Cu.

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