Sputtering target material

Metal treatment – Stock – Noble metal base

Reexamination Certificate

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Details

C420S505000

Reexamination Certificate

active

07959746

ABSTRACT:
This invention provides sputtering target materials having high reflectance and excellent heat resistance, which are formed of Ag base alloys formed by adding a specific, minor amount of P to Ag and alloying them.

REFERENCES:
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“ASM Handbooks Online”, vol. 5 Surface Engineering, http://products.asminternational.org/hbk/index.jsp, 2002.
Supplementary European Search Report issued Aug. 8, 2008 in connection with European Application No. 04 79 2511.0 corresponding to the present U.S. application.

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