Sputtering target

Details Sputtering target Sputtering target

1993-10-01

1995-12-26

Breneman, R. Bruce

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419212, 501 88, 501 98, 501152, 264 41, 264 63, 264 65, C23C 1400, C04B 3552, C04B 3550, C04B 3564

Patent

active

054784565

ABSTRACT:
Electrically conductive sputtering target comprising yttria and amorphous carbon, a method of making the same, and a method of using the same.

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