Sputtering shields and method of manufacture

Details Sputtering shields and method of manufacture Sputtering shields and method of manufacture

1992-06-26

1997-06-10

Nguyen, Nam

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20429811, 264 86, 4273722, C23C 1434

Patent

active

056371993

ABSTRACT:
Coated shields useful in a sputtering deposition chamber comprise a binder and particles of the same material as the target. Application of the coating material to interior surfaces and appliances of the sputtering chamber reduces contamination of the sputtered material.

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