Sputtering process for preparing vitreous compositions based on

Details Sputtering process for preparing vitreous compositions based on Sputtering process for preparing vitreous compositions based on

1991-09-30

1992-08-25

Weisstuch, Aaron

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

C23C 1434

Patent

active

051416140

ABSTRACT:
Vitreous solid compositions are prepared via an RF sputtering process in an inert gas atmosphere from a target composition comprised of either Li.sub.3 PO.sub.4 or LiPO.sub.3 as a network former or network modifier.

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