Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2009-03-11
2011-12-13
Phan, Huy Q (Department: 2858)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S750030, C324S705000, C324S750090, C324S762010, C257S048000, C438S014000, C165S104330
Reexamination Certificate
active
08076951
ABSTRACT:
A micro-spray cooling system beneficial for use in testers of electrically stimulated integrated circuit chips is disclosed. The system includes micro-spray heads disposed about a probe head. The spray heads and probe head are disposed in a sealed manner inside a spray chamber that, during operation, is urged in a sealing manner onto a sealing plate holding the integrated circuit under test. The atomized mist cools the integrated circuit and then condenses on the spray chamber wall. The condensed fluid is pumped out of the chamber and is circulated in a chiller, so as to be re-circulated and injected again into the micro-spray heads. The pressure inside the spray chamber may be controlled to provide a desired boiling point.
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Cader Tahir
Frank Jonathan D.
Roberts Alan Brent
Tilton Charles Lester
Tolman Benjamin Hewett
Bach, Esq. Joseph
Chan Emily Y
DCG Systems, Inc.
Isothermal Systems Research Inc.
Nixon & Peabody LLP
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