Spot grid array scanning system

Details Spot grid array scanning system Spot grid array scanning system

2006-01-19

2008-12-23

Sohn, Seung C. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C250S235000, C250S559160, C250S559220, C356S601000

Reexamination Certificate

active

07468506

ABSTRACT:
A method for scanning a surface, consisting of focusing an array of beams using optics having an axis, so as to irradiate a region of the surface intercepted by the axis, such that each beam irradiates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the beams is scanned over the respective sub-region in a second direction, which is different from the first direction.

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