Data processing: structural design – modeling – simulation – and em – Simulating nonelectrical device or system
Reexamination Certificate
2005-01-10
2009-11-24
Frejd, Russell (Department: 2128)
Data processing: structural design, modeling, simulation, and em
Simulating nonelectrical device or system
C700S108000
Reexamination Certificate
active
07624003
ABSTRACT:
In at least one embodiment, the present invention is a method for thin-film process chamber data analysis, which includes acquiring chamber data, defining an adjustment portion of the chamber data and a steady-state portion of the chamber data, and forming a chamber model having an adjustment portion and a steady-state portion. The method can further include comparing the chamber model with a subject chamber to provide a chamber data comparison and utilizing the chamber data comparison.
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Applied Materials Inc.
Balzan Christopher R.
Frejd Russell
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