Split gate flash memory and formation method thereof

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S316000

Reexamination Certificate

active

06888193

ABSTRACT:
A split gate flash memory. A drain is disposed in the bottom of a trench formed in a substrate. A source is disposed in the substrate outside the trench. A striped floating gate is disposed at a sidewall of the trench, wherein one side of the striped floating gate is near the bottom of the trench, and the other side of the striped floating gate protrudes above the substrate. A control gate winds along the floating gate, wherein one side of the control gate is near the bottom of the trench, and the other side of the control gate in outside the trench. A metal bit line connects to the drain.

REFERENCES:
patent: 6770934 (2004-08-01), Hung et al.
patent: 20040067618 (2004-04-01), Chang et al.
patent: 20040183121 (2004-09-01), Yeh et al.

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