Split-field pupil plane determination apparatus

Details Split-field pupil plane determination apparatus Split-field pupil plane determination apparatus

1995-05-30

1996-10-29

Hantis, K.

Optics: measuring and testing

By alignment in lateral direction

356138, 356150, 356153, G01B 1126

Patent

active

055701892

ABSTRACT:
A split-field pupil plane determination apparatus (10) having a wedge assembly (16) with a first glass wedge (18) and a second glass wedge (20) positioned to divide a laser beam (12) into a first laser beam half (22) and a second laser beam half (24) which diverge away from the wedge assembly (16). A wire mask (26) is positioned immediately after the wedge assembly (16) in the path of the laser beam halves (22, 24) such that a shadow thereof is cast as a first shadow half (30) and a second shadow half (32) at the input to a relay telescope (14). The relay telescope (14) causes the laser beam halves (22, 24) to converge such that the first shadow half (30) of the wire mask (26) is aligned with the second shadow half (32) at any subsequent pupil plane (34).

REFERENCES:
patent: 3574467 (1971-04-01), Paine et al.
patent: 3637312 (1972-01-01), Cantor et al.
patent: 3836258 (1974-09-01), Courten et al.
patent: 4238157 (1980-12-01), Strauch et al.

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