4. Coating apparatus
  5. With means to centrifuge work

Katsuyuki Arii

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Apparatus for loading and unloading a vacuum processing chamber

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
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Spinner and method for processing a substrate

Coating apparatus – With means to centrifuge work
Patent

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Profile ID: LFUS-PAI-P-896560

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