Spindrier

Details Spindrier Spindrier

1993-04-07

1995-07-25

Gromada, Denise L.

Drying and gas or vapor contact with solids

Apparatus

With apparatus using centrifugal force

34317, 34187, F26B 1724

Patent

active

054350751

ABSTRACT:
A spindrier comprises a box enclosing a plurality of wafers, a motor for rotating the wafers in the box, upper and lower clamp bars for holding the wafers face to face and substantially perpendicular to a rotating shaft of rotating means, and gas introducing and discharging mechanisms for generating a flow of clean gas in the box. A sectional area of an open bottom of the box is smaller than a sectional area of an open top of the box, and the gas flows from the open top to the open bottom.

REFERENCES:
patent: 4735000 (1988-04-01), Hayashi et al.
patent: 5050316 (1991-09-01), Aigo
patent: 5150532 (1992-09-01), Aigo

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