Spin scrubber apparatus

Details Spin scrubber apparatus Spin scrubber apparatus

2006-02-24

2009-10-06

Stinson, Frankie L (Department: 1792)

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

C134S164000, C134S902000

Reexamination Certificate

active

07597109

ABSTRACT:
A spin scrubber apparatus has an index unit configured to support one or more cassettes, a processing unit having one or more cleaning stations facing the index unit across a transfer space, and a substrate transfer device disposed in the transfer space for transferring substrates one-by-one between the index unit and the processing unit. The transfer device includes a transfer block, and an index arm and a transfer arm unit supported by the transfer block. The transfer block is movable in the transfer space to position the index arm or the transfer arm unit in front of a cassette or a spin scrubber. The index arm loads/unloads substrates into/from a cassette mounted to the index unit. The transfer arm loads/unloads substrates into/from the processing unit. All of the movement takes place in the transfer space. Thus, the apparatus is compact, and it takes relatively little time to clean the substrates.

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