Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – From silicon reactant having at least one...
Reexamination Certificate
2005-11-29
2005-11-29
Moore, Margaret G. (Department: 1712)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
From silicon reactant having at least one...
C528S034000, C528S028000, C528S026000, C528S029000, C428S447000, C106S287110
Reexamination Certificate
active
06969753
ABSTRACT:
Anti-reflective coating materials for deep ultraviolet photolithography include one or more organic light-absorbing compounds incorporated into spin-on-glass materials. Suitable absorbing compounds are strongly absorbing over wavelength ranges around wavelengths such as 365 nm, 248 nm, and 193 nm that may be used in photolithography. A method of making absorbing spin-on-glass materials includes combining one or more organic absorbing compounds with alkoxysilane or halosilane reactants during synthesis of the spin-on-glass materials.
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Baldwin Teresa
Hacker Nigel
Kennedy Joseph
Spear Richard
Bingham McCutchen
Honeywell International , Inc.
Moore Margaret G.
Thompson Sandra P.
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