Spin head, method of operating the spin head and apparatus...

Details Spin head, method of operating the spin head and apparatus... Spin head, method of operating the spin head and apparatus...

2007-11-27

2011-10-18

MacArthur, Sylvia R. (Department: 1716)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With workpiece support

C118S730000

Reexamination Certificate

active

08038838

ABSTRACT:
A spin head includes chucking pins configures to chuck and unchuck a substrate. Contact portions of the chucking pins and the substrate are varied during a process to prevent a treating solution from remaining at the contact portions.

REFERENCES:
patent: 5989342 (1999-11-01), Ikeda et al.
patent: 7018555 (2006-03-01), Shimbara et al.
patent: 2002/0027138 (2002-03-01), Hyobu
patent: 2008/0052948 (2008-03-01), Kim et al.
patent: 2008/0127888 (2008-06-01), Kim et al.
patent: 04190548 (1992-07-01), None
patent: 05102203 (1993-04-01), None
patent: 09-148416 (1997-06-01), None
patent: 2004092871 (2004-03-01), None
patent: 2004111902 (2004-04-01), None
patent: 2005-260088 (2005-09-01), None
patent: 97-006206 (1987-09-01), None
Note: The four (4) Japanese references were cited in a first Office Action issued Apr. 20, 2010 in the corresponding Japanese patent application.

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