Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1991-11-29
1992-11-24
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250306, 250397, H01J 4700
Patent
active
051665220
ABSTRACT:
A measured electron beam having a polarization vector as represented by arrow is irradiated to a ferromagnetic target made of an iron single crystal through a polarization vector rotator comprising a magnetic field generation coil and an electrostatic lens. A magnetic field generator is coupled with the target and aligns the direction of magnetization of the target in a direction represented by arrow. An oscillator for providing a rotation signal of the polarization vector of the measured electron beam is connected to the polarization vector rotator. The current absorbed by the target is detected and amplified by a current amplifier. A lock-in amplifier detects the phase and the magnitude of an A.C. component using the signal from the oscillator as a reference signal. The magnitude of the D.C. component of the absorbed current is detected by a D.C. current detector.
REFERENCES:
patent: 4153844 (1979-05-01), Kirschner
patent: 4658138 (1987-04-01), Koike et al.
patent: 4760254 (1988-07-01), Pierce et al.
patent: 4954770 (1990-09-01), Matsuyama et al.
Dodt et al., "Spin and Energy dependence of the electron current absorbed by .alpha.-Fe (001) Thin Film" Europhysics Letter, 6(4), pp. 375-379 (1988).
Furukawa Takashi
Koike Kazuyuki
Matsuyama Hideo
Berman Jack I.
Hitachi , Ltd.
Nguyen Kiet T.
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