Spin coating spindle and chuck assembly

Details Spin coating spindle and chuck assembly Spin coating spindle and chuck assembly

1996-06-21

1999-11-16

Edwards, Laura

Coating apparatus

Work holders, or handling devices

118 52, 118 56, 118728, 118730, B05C 1300

Patent

active

059850310

ABSTRACT:
An apparatus and methods for use in spin coating a coating material onto a wafer. The apparatus includes a rotatable chuck capable of supporting the wafer and a bowl having a bottom and a side defining an interior region, the bottom containing an opening through which said rotatable chuck is movable and separable from the bowl. In a preferred embodiment the bottom has a raised cylindrical portion containing the opening and, the rotatable chuck is positioned within the opening so that the wafer is in close proximity to the raised portion of the bowl so as to prevent solvent vapors from escaping the bowl through the opening.

REFERENCES:
patent: 4790262 (1988-12-01), Nakayama et al.
patent: 5289222 (1994-02-01), Hurtig
patent: 5514214 (1996-05-01), Joel et al.
patent: 5830272 (1998-11-01), Begin et al.

Affiliated with

Also associated with

Rating

Spin coating spindle and chuck assembly does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Spin coating spindle and chuck assembly, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Spin coating spindle and chuck assembly will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1319050