Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate
2005-06-28
2005-06-28
Rachuba, M. (Department: 3723)
Abrading
Abrading process
Glass or stone abrading
C451S287000, C451S288000, C451S398000, C451S402000
Reexamination Certificate
active
06910949
ABSTRACT:
A polishing head for use in an apparatus for chemically-mechanically polishing semiconductor wafers is provided. The polishing head includes a first side having at least a portion thereof operably connectable with a spindle on the apparatus; and a second side opposite the first side, the second side having a substantially spherical cap shape comprising an outer region adapted to apply a first force onto a semiconductor wafer against a polishing pad, and an inner region adapted to apply a second force onto the semiconductor wafer against the polishing pad, the second force being different from the first force, whereby the first force and the second force cause the polishing pad to planarize the semiconductor wafer substantially uniformly. A method of polishing semiconductor wafers is also provided.
REFERENCES:
patent: 3920233 (1975-11-01), Stuckert
patent: 5441444 (1995-08-01), Nakajima
patent: 5571044 (1996-11-01), Bolandi et al.
patent: 5651724 (1997-07-01), Kimura et al.
patent: 5762544 (1998-06-01), Zuniga et al.
patent: 5769692 (1998-06-01), Pasch et al.
patent: 5769696 (1998-06-01), Lee et al.
patent: 5769699 (1998-06-01), Yu
patent: 5791973 (1998-08-01), Nishio
patent: 5795215 (1998-08-01), Guthrie et al.
patent: 5803799 (1998-09-01), Volodarsky et al.
patent: 5857899 (1999-01-01), Volodarsky et al.
patent: 5916012 (1999-06-01), Pant et al.
patent: 5931725 (1999-08-01), Inaba et al.
patent: 5938884 (1999-08-01), Hoshizaki et al.
patent: 6024630 (2000-02-01), Shendon et al.
patent: 6068544 (2000-05-01), Chiu et al.
patent: 6080049 (2000-06-01), Numoto et al.
patent: 6086460 (2000-07-01), Labunsky et al.
patent: 6090475 (2000-07-01), Robinson et al.
patent: 6113466 (2000-09-01), Lin
patent: 6174221 (2001-01-01), Gotcher, Jr.
patent: 6176764 (2001-01-01), Gotcher
patent: 6283834 (2001-09-01), Liauzu
patent: 6290577 (2001-09-01), Shendon et al.
patent: 6315649 (2001-11-01), Hu et al.
patent: 6416402 (2002-07-01), Moore
patent: 6422927 (2002-07-01), Zuniga
Brinks Hofer Gilson & Lione
Lam Research Corporation
Rachuba M.
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