SPER Device for material working

Details SPER Device for material working SPER Device for material working

1982-06-18

1983-10-25

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

118620, 118715, 156646, 156656, 156345, 204192R, 204192E, 204298, 372 62, 427 38, H01L 21306, C23F 100, B05D 306, B05B 502

Patent

active

044117337

ABSTRACT:
A segmented plasma excitation and recombination (SPER) device is employed in a deposition scheme in which the plasma generated in the gap between adjacent electrodes is formed into a beam of ions/atoms by flowing a background gas through the gap. The beam strikes a workpiece and deposits a layer of the vaporized electrode material thereon. Also described are techniques where the ions react with workpiece or the background gas to form a layer, as well as where the ions bombard the workpiece to etch away a layer.

REFERENCES:
patent: 3479269 (1969-11-01), Byrnes et al.
patent: 4123316 (1978-10-01), Tsuchimoto
patent: 4201645 (1980-05-01), Riegert
patent: 4336506 (1982-06-01), Silfvast et al.
Thin Film Technology by Robert W. Berry et al., 1968, pp. 3-11, 156-157 and 204-208.

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