Spectroscopy

Details Spectroscopy Spectroscopy

1974-05-09

1979-01-09

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250305, H01K 3726, H01J 3900

Patent

active

041340140

ABSTRACT:
A method of performing Auger electron spectroscopic surface analysis, e.g. of silicon, in which the secondary electrons which leave the target material are analyzed without the use of an electron optic device. An a.c. signal modulated retard potential is applied in ramp form to the target and a detection circuit connected to the target measures the component of current to earth from the target at the second harmonic of the a.c. modulation signal. The output of the detection circuit is plotted as a function of the retard potential to produce a spectrum of the first derivative of the secondary electron energy with respect to the retard potential so as to enhance the display of Auger transitions. Alternative realizations are described of a circuit arrangement including a four-port network for coupling the target, a.c. modulation signal source, retard potential source, and detector circuit.

REFERENCES:
patent: 3535516 (1970-10-01), Munakata
patent: 3678384 (1972-07-01), Oatley
patent: 3681600 (1972-08-01), Rigden et al.
patent: 3736422 (1973-05-01), Weber et al.
"Voltage Measurement--Electron Probe" by J. P. Flemming, J. Physics E (G.B.) vol. 4, No. 10 (Oct. 1971).

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