Optics: measuring and testing – By polarized light examination – Of surface reflection
Patent
1993-04-21
1994-07-12
Rosenberger, Richard A.
Optics: measuring and testing
By polarized light examination
Of surface reflection
356367, G01N 2121
Patent
active
053293576
ABSTRACT:
A spectroscopic ellipsometer comprises a wideband light source, together with a first optical system including a rotating polarizer which applies a parallel beam to a sample contained in an enclosure. The reflected beam is picked up by an analyzer in a second optical system which transmits said reflected beam to a monochromator which is followed by a photodetector which is connected to control electronics connected, in turn, to a microcomputer. An optical fiber is provided between the source and the first optical system. Advantageously, a second optical fiber provided between the second optical system and the monochromator.
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Bernoux Franck
Stehle Jean-Louis
Rosenberger Richard A.
Sopra-Societe De Production Et De Recherches Appliquees
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