Spectroscopic ellipsometer and ellipsometry

Details Spectroscopic ellipsometer and ellipsometry Spectroscopic ellipsometer and ellipsometry

2011-01-04

2011-01-04

Nguyen, Tu T (Department: 2886)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

07864318

ABSTRACT:
A spectroscopic ellipsometer has a polarized light generating part for generating elliptically polarized lights of a plurality of wavelengths included in a predetermined measurement wavelength band from white light and directing the elliptically polarized lights to a measurement surface of a substrate, a rotating analyzer where reflected light reflected on the measurement surface enters, and a spectrometer for acquiring spectral intensity of light from the rotating analyzer. A polarization state acquiring part in a control part acquires a polarization state at each wavelength in the measurement wavelength band of the reflected light. The optical characteristic calculation part obtains a film thickness on the measurement surface with high accuracy on the basis of differences between measurement values and theoretical values, the measurement values representing change of a complex amplitude ratio between a p-polarized component and an s-polarized component and a phase difference between a p-polarized component and an s-polarized component.

REFERENCES:
patent: 5956144 (1999-09-01), Kaplan et al.
patent: 7385697 (2008-06-01), Woollam et al.
patent: 2004/0233437 (2004-11-01), Horie
patent: 2005-003666 (2005-01-01), None

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