Spectroscopic ellipsometer

Details Spectroscopic ellipsometer Spectroscopic ellipsometer

2011-07-05

2011-07-05

Lauchman, L. G (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

C356S364000

Reexamination Certificate

active

07973930

ABSTRACT:
A spectroscopic ellipsometer can compare data different in a measurement condition and facilitate setting an initial value of fitting data even for an inexperienced operator such as a beginner. The spectroscopic ellipsometer includes a reference data storage part storing therein reference data to be compared with measurement data, a conversion operation part converting the measurement data or the reference data into comparable data, so that the measurement data can be compared with the reference data, and a comparison and determination part comparing the measurement data with the reference data made comparable by the conversion operation part with each other and determining a coincidence between the measurement data and the reference data.

REFERENCES:
patent: 5835220 (1998-11-01), Kazama et al.
patent: 7196793 (2007-03-01), Nabatova-Gabain et al.
patent: 7280210 (2007-10-01), Nabatova-Gabain et al.
patent: 2005/308607 (2005-11-01), None

Affiliated with

Also associated with

Rating

Spectroscopic ellipsometer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Spectroscopic ellipsometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Spectroscopic ellipsometer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2722946