Optics: measuring and testing – By polarized light examination – Of surface reflection
Patent
1998-07-08
2000-04-18
Evans, F. L.
Optics: measuring and testing
By polarized light examination
Of surface reflection
G01N 2121
Patent
active
060521880
ABSTRACT:
A spectral ellipsometer that enables complete simultaneous measurement of ellipsometric parameters of a surface with thin films and coatings for the full wavelength range of interest by using an imaging spectrograph together with a novel optical arrangement that disperses the polarization information of a time-invariant train of optical signals in a linear spatial array of points along or parallel to an input aperture or slit of the imaging spectrograph and disperses the polarization information in wavelength perpendicular to the aperture or slit to provide a two-dimensional spectrograph image that is collected and stored by an imaging array with one axis relating to wavelength and the other axis relating to the light polarization. Multiple simultaneous measurements of the spectral ellipsometric parameters .psi. (psi) and .DELTA. (delta) are taken at all wavelengths without the need of any time-varying or mechanically-moving optical elements. The ellipsometer can be used for real-time measurements of ellipsometric parameters of a moving or static surface with the thin films and coatings.
REFERENCES:
patent: 5335066 (1994-08-01), Yamada et al.
patent: 5373359 (1994-12-01), Woollam et al.
patent: 5425839 (1995-06-01), Henck
patent: 5548404 (1996-08-01), Kupershmidt et al.
patent: 5620556 (1997-04-01), Henck
patent: 5657126 (1997-08-01), Ducharme et al.
Fluckiger David U.
Kueny Andrew W.
Evans F. L.
Verity Instruments Inc.
LandOfFree
Spectroscopic ellipsometer does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Spectroscopic ellipsometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Spectroscopic ellipsometer will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2340551