Spectroscopic ellipsometer

Details Spectroscopic ellipsometer Spectroscopic ellipsometer

1987-10-14

1989-05-30

Willis, Davis L.

Optics: measuring and testing

By polarized light examination

Of surface reflection

356244, G01N 2121

Patent

active

048345393

ABSTRACT:
A spectroscopic ellipsometer comprises an illumination device having a focal point (F'.sub.2) for illuminating a surface of a sample (E) in accordance with a given angle of incidence and a device for analyzing the light reflected from the surface of the sample. The sample support comprises three translation plates (20,30,40) in accordance with three respective directions (T.sub.2, T.sub.3, T.sub.1). The translations in accordance with the first (T.sub.1) and second (T.sub.2) directions make it possible to realise cartographic representations of the sample (E) and the translation in accordance with the third direction (T.sub.3) makes it possible to cause a point on the surface of the same (E) to coincide with the focal point (F'.sub.2). Two plates (PT.sub.2, 12) rotating about the axes O.sub.1 and O.sub.2, respectively, parallel to the first (T.sub.1) and second (T.sub.2) directions and intersecting each other at the focal point (F'.sub.2) provide the possibility of orienting the sample (E) by means of rotation in two orthogonal planes about the focal point (F'.sub. 2).

REFERENCES:
patent: 4210401 (1980-07-01), Batten
Gardner et al., "Automatic Infrared Ellipsometer for Characterizing Films on Multilayer Surfaces", IBM Tech. Discl. Bull., vol. 16, No. 6, p. 1959, 11/73.

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