Optics: measuring and testing – Refraction testing – Prism engaging specimen
Patent
1976-09-10
1978-03-07
Corbin, John K.
Optics: measuring and testing
Refraction testing
Prism engaging specimen
G01N 2140
Patent
active
040777200
ABSTRACT:
A spectroscopic auto ellipsometer for measuring two variables of polarized light (principal angle of incidence and amplitude-reflection ratio angle) by using the principal angle of incidence method comprises an illumination optical system, a polarizer set to a predetermined azimuth and rotatable with respect to the optical axis of the illumination optical system, a table supporting thereon a sample and rotatable for varying the angle of incidence at which linearly polarized light passed through the polarizer impinges on the sample, an analyzer rotatable at a predetermined velocity on the reflection optical axis from the sample, photoelectric converter means for converting the intensity of light emergent from the analyzer into electrical signal, holder means holding the analyzer and the photoelectric converter means integrally with each other and operatively associated with the sample supporting table so as to be rotated through an angle of .+-.2.theta. for rotation of the sample supporting table through an angle of .+-..theta., reference signal generating means for generating, during rotation of the analyzer, reference signal at at least one of .+-.90.degree. azimuths on the Poincare's sphere with respect to the predetermined azimuth of the polarizer, first control means for comparing the output of the photoelectric converter means with the reference signal from the reference signal generating means and for rotating the sample supporting table until the maximum or the minimum value of the output from the photoelectric converter means is coincident with the reference signal, and second control means operable after completion of the control by the first control means to rotate the polarizer from its predetermined azimuth until the output of the photoelectric converter means assumes a predetermined constant value.
REFERENCES:
patent: 3741661 (1973-06-01), Yamamoto et al.
patent: 3992104 (1976-11-01), Watanabe
Jungk, G. "Determination of Optical Constants: A Null-Method", Phys. Stat. Sol. (a) vol. 3, 1970, pp. 965-970.
Corbin John K.
Nippon Kogaku K.K.
Punter Wm. H.
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