Spectrometer objective having parallel objective fields and spec

Details Spectrometer objective having parallel objective fields and spec Spectrometer objective having parallel objective fields and spec

1983-07-14

1985-09-10

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250305, 250396ML, H01J 4944

Patent

active

045408858

ABSTRACT:
An apparatus for the potential measuring technique has an objective lens for focusing primary electrons onto an object, and also has a spectrometer for the energy selection of secondary electrons to provide an improvement of the quantitative potential measurement on printed conductors of integrated microelectronic components with improved local resolution, higher probe current, and improved potential resolution. The objective lens is a magnetic lens in which the lens field lies largely outside the lens body, and the spectrometer is an electrostatic retarding field spectrometer arranged in the magnetic field of the lens.

REFERENCES:
patent: 3870891 (1975-03-01), Mulvey
patent: 4315152 (1982-02-01), Smith
patent: 4442335 (1984-04-01), Tamura et al.
patent: 4464571 (1984-07-01), Plies
"Mini Lenses and the SEM," T. Mulvey, Scanning Electron Microscopy, Apr. 1974, pp. 43-50.
"VLSI Testing Using the Electron Probe" by H. P. Feuerbaum, Scanning Electron Microscopy/1979/I SEM Inc., AMF O'Hare, IL, pp. 285-296.

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