Spectrometer objective for particle beam measurement technique

Details Spectrometer objective for particle beam measurement technique Spectrometer objective for particle beam measurement technique

1983-07-14

1985-11-05

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250356R, H01J 3726

Patent

active

045516251

ABSTRACT:
An arrangement for particle beam measurement utilizes, an objective for the imaging of primary probe particles on a specimen and a spectrometer for the detection of secondary particles. The arrangement also utilizes the superposition of the electric field of the spectrometer with the electric field of the objective lens to render possible an effective increase of the probe current and/or an improved potential resolution. A portion of the field of the objective is provided for the focusing of the secondary particles onto an electrode for determining energy selection.

REFERENCES:
patent: 3717761 (1973-02-01), Koike et al.
patent: 3822382 (1974-07-01), Koike
patent: 4292519 (1981-09-01), Feuerbaum
H. P. Feuerbaum, Scanning Electron Microscopy, SEM, Inc., pp. 285-296, (1979).

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