Spectrometer lens for particle beam apparatus

Details Spectrometer lens for particle beam apparatus Spectrometer lens for particle beam apparatus

1987-03-09

1988-09-06

Fields, Carolyn E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250305, 250396R, 250396ML, H01J 4900

Patent

active

047695439

ABSTRACT:
A spectrometer-lens for particle beam apparatus is formed by a short focal length magnetic lens having an integrated electrostatic retarding field spectrometer and a single-stage deflection unit arranged within said lens. To avoid deflecting secondary particles that are triggered at a specimen by a primary particle beam, nearly uniform electrical and magnetic deflection fields are generated by the deflection unit oriented relative to one another such that their field vectors reside perpendicular to one another and respectively perpendicular to a velocity vector of the secondary particles attracted from the specimen.

REFERENCES:
patent: 3930181 (1975-12-01), Pfeiffer
patent: 4019989 (1977-04-01), Hazewindus et al.
patent: 4395691 (1983-07-01), Knauer
patent: 4464571 (1984-08-01), Plies
patent: 4590379 (1986-05-01), Martin
patent: 4658136 (1987-04-01), Ohtaka et al.
patent: 4684808 (1987-08-01), Plies et al.
"Proceedings of the Symposium on Electron Beam Testing", Nov. 9-10, Osaka, Japan, pp. 69-72.
K. H. Herrmann et al "The Design of Compact Deflection Coils and Their Application to a Minimum Exposure System", 6th European Congress on Electron Microscopy, Jerusalem, 1976, pp. 342 and 343.
Co-pending U.S. Patent Application, Feurbaum et al., No. 874,498.

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