Spectrographic metrology of patterned wafers

Details Spectrographic metrology of patterned wafers Spectrographic metrology of patterned wafers

2011-06-28

2011-06-28

Geisel, Kara E (Department: 2877)

Optics: measuring and testing

By dispersed light spectroscopy

C382S145000

Reexamination Certificate

active

07969568

ABSTRACT:
Light reflected from respective image elements of a workpiece is channeled through respective light channeling elements to respective locations of a spectrographic light disperser. Spectral distributions of the respective image elements produced by the spectrographic light disperser are recorded. A processor groups similar spectral distributions into respective groups of mutually similar distributions, and classifies the groups by the number of distributions contained in each group.

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