Optical: systems and elements – Having significant infrared or ultraviolet property – Multilayer filter or multilayer reflector
Reexamination Certificate
2006-01-24
2008-12-09
Amari, Alessandro (Department: 2872)
Optical: systems and elements
Having significant infrared or ultraviolet property
Multilayer filter or multilayer reflector
C359S588000, C359S589000, C355S071000
Reexamination Certificate
active
07463413
ABSTRACT:
A multi-layer mirror includes on top of the multi-layer mirror a spectral purity enhancement layer, for example for application in an EUV lithographic apparatus. This spectral purity enhancement layer includes a first spectral purity enhancement layer, but between the multi-layer mirror and first spectral purity enhancement layer there may optionally be an intermediate layer or a second spectral purity enhancement layer and intermediate layer. Hence, multi-layer mirrors with the following configurations are possible: multi-layer mirror/first spectral purity enhancement layer; multi-layer mirror/intermediate layer/first spectral purity enhancement layer; and multi-layer mirror/second spectral purity enhancement layer/intermediate layer/first spectral purity enhancement layer. The spectral purity of normal incidence radiation may be enhanced, such that DUV radiation is diminished relatively stronger than EUV radiation.
REFERENCES:
patent: 5958605 (1999-09-01), Montcalm et al.
patent: 6359969 (2002-03-01), Shmaenok
patent: 6441963 (2002-08-01), Murakami et al.
patent: 6556648 (2003-04-01), Bal et al.
patent: 6576912 (2003-06-01), Visser et al.
patent: 6614505 (2003-09-01), Koster et al.
patent: 7193228 (2007-03-01), Bowering et al.
patent: 2004/0051954 (2004-03-01), Bristol
patent: 2004/0094274 (2004-05-01), Judkins
patent: 2004/0105083 (2004-06-01), Kurt et al.
patent: WO 99/24851 (1999-05-01), None
patent: 2004/053540 (2004-06-01), None
patent: 2004/104707 (2004-12-01), None
European Search Report issued in EP 06 11 3136 dated Sep. 1, 2006.
J. H. Underwood, et al., “Layered synthetic microstructures as Bragg diffractors for X rays and extreme ultraviolent: theory and predicted performance”, Applied Optics, vol. 20 No. 17 (Sep. 1, 1981).
K. M. Skulina et al., “Molybdenum/beryllium multilayer mirrors for normal incidence in the extreme ultraviolet”, Applied Optics, vol. 34, No. 19 (Jul. 1, 1995).
Bakker Levinus Pieter
Banine Vadim Yevgenyevich
Klunder Derk Jan Wilfred
Van Herpen Maarten Marinus Johannes Wilhelmus
Amari Alessandro
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
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