Specimen stage apparatus and specimen stage positioning...

Details Specimen stage apparatus and specimen stage positioning... Specimen stage apparatus and specimen stage positioning...

2009-03-31

2011-12-13

Nguyen, Kiet T (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

Reexamination Certificate

active

08076651

ABSTRACT:
A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.

REFERENCES:
patent: 5040431 (1991-08-01), Sakino et al.
patent: 7435974 (2008-10-01), Matsushima
patent: 7900896 (2011-03-01), Fujita
patent: 03-061728 (1991-03-01), None
patent: 08-222500 (1996-08-01), None
patent: 2001-069773 (2001-03-01), None
patent: 2001-088695 (2001-04-01), None
patent: 2001-225241 (2001-08-01), None
Japanese Office Action, w/ partial English translation thereof, issued in Japanese Patent Application No. JP 2008-095649 dated Jul. 9, 2010.
Japanese Office Action, w/ partial English translation thereof, issued in Japanese Patent Application No. JP 2008-095649 dated Feb. 10, 2011.

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