Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
2007-03-13
2009-08-11
Vanore, David A (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C250S306000, C250S310000, C250S311000, C250S397000, C250S400000
Reexamination Certificate
active
07573030
ABSTRACT:
It is an object of the present invention to provide a specimen observation method, an image processing device, and a charged-particle beam device which are preferable for selecting, based on an image acquired by an optical microscope, an image area that should be acquired in a charged-particle beam device the representative of which is an electron microscope. In the present invention, in order to accomplish the above-described object, there are provided a method and a device for determining the position for detection of charged particles by making the comparison between a stained optical microscope image and an elemental mapping image formed based on X-rays detected by irradiation with the charged-particle beam.
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Kobayashi Hiroyuki
Nakazawa Eiko
Tomita Masahiro
Hitachi High-Technologies Corporation
Logie Michael J
McDermott Will & Emery LLP
Vanore David A
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