Specimen mount for secondary ion mass spectrometry and other sen

Details Specimen mount for secondary ion mass spectrometry and other sen Specimen mount for secondary ion mass spectrometry and other sen

1984-08-20

1989-07-25

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

2504421, 2504923, G01N 2300, G21K 510

Patent

active

048516724

ABSTRACT:
A specimen mount for secondary ion mass spectrometry, as well for other sensitive particle beam analysis methods, has a rotatable support element to which at least one carrier is secured, a specimen being affixed to a free end of the carrier. The dimensions of the carrier in directions perpendicular to the propagation direction of the ion or particle beam are smaller than the dimensions of the specimen mounted thereon, so that only the specimen, and no surrounding environment, is in the beam path. The rotatable element is driven so as to move one or more of the carriers with the specimens mounted thereon through the beam path.

REFERENCES:
patent: 3086112 (1963-04-01), Riecke
patent: 3629577 (1971-12-01), Weber et al.
patent: 3911282 (1975-10-01), Bergan
patent: 4405864 (1983-09-01), del Rio
patent: 4465935 (1984-08-01), von Criegern et al.

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